等级 | PM0.1–0.3 效率 | 典型应用 |
H13 | ≥ 99.97% | 电子、食品厂、一般洁净室 |
H14 | ≥ 99.995% | 半导体、制药、实验室 |
U15 | ≥ 99.9995% | 关键区域、生物制药、无菌区域 |
U16 | ≥ 99.99995% | BSL实验室、肿瘤药物、光刻区域 |
U17 | ≥ 99.999995% | 超关键区域,很少需要 |
类型 | 优点 | 典型用途 |
中褶式(无隔板) | 低阻力、轻质、大风量 | FFU、HVAC、洁净室 |
箱式HEPA | 刚性,防潮 | 工业和高湿度区域 |
PTFE / ePTFE | 最稳定,无效率衰减 | 半导体,制药 |
纳米纤维HEPA | 最低压降,节能 | 数据中心,电池工厂 |
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